Chung-Hua University Repository:Item 987654321/41011
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    Please use this identifier to cite or link to this item: http://chur.chu.edu.tw/handle/987654321/41011


    Title: Microwave Annealing
    Authors: 賴瓊惠
    Lai, Chiung-Hui
    Contributors: 電子工程學系
    Electronics Engineering
    Keywords: 微波退火
    Microwave Annealing
    Date: 2012
    Issue Date: 2014-07-18 13:31:15 (UTC+8)
    Abstract: 微波退火可以在低溫下活化參雜物
    By use of Microwave Annealing, donpants in the implanted silicon could be well-activated at low temperatures without diffusion.
    Appears in Collections:[Department of Microelectronics] Seminar Papers

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