研究不同混合氣體氮氣和氧氣比例的氧化過程對矽鍺奈米線的靈敏度的改善 Ge condensation has been reported to improve the hole mobility of the SiGe-on-insulator (SGOI). Our previous studies have shown that the higher Ge fraction of Si1-xGex nano-wire exhibits higher sensitivity. In this work, we investigated the effect of diff
