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    請使用永久網址來引用或連結此文件: http://chur.chu.edu.tw/handle/987654321/34003


    題名: The High-Speed Measurement of a Partial Area Imaging System Applied to Photoresist Development Processing
    作者: 邱奕契
    Chiou, Yih-Chih
    貢獻者: 機械工程學系
    Mechanical Engineering
    關鍵詞: Photolithography;exposure and development time;high speed image inspection system
    Photolithography;exposure and development time;high speed image inspection system
    日期: 2005
    上傳時間: 2014-06-27 02:37:09 (UTC+8)
    摘要: Among the parameters that affect photolithography,the most important are exposure and development time which affect the coating photoresist characteristics.This study further researches the relationship between the exposure and development time using a hi
    Among the parameters that affect photolithography,the most important are exposure and development time which affect the coating photoresist characteristics.This study further researches the relationship between the exposure and development time using a hi
    顯示於類別:[機械工程學系] 期刊論文

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