大的表面體積比可以提高感測器的靈敏度,最佳化的矽/矽鍺堆疊比例可以增加靈敏度. Because of the large surface-to-volume ratio of
nano-structure, the silicon nanowires (SiNWs) provide a
high sensitivity for highly sensitive detection of biological
and chemical species. Moreover, the SiGe-on-Insulator
(SGOI) by Ge-condensation process c
