Sensitivity Improvement in SGOI Biosensor by Varying Structure and Oxidation

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Title:	Sensitivity Improvement in SGOI Biosensor by Varying Structure and Oxidation
Authors:	賴瓊惠 Lai, Chiung-Hui
Contributors:	電子工程學系 Electronics Engineering
Keywords:	生物感測器 biosensor
Date:	2011
Issue Date:	2014-06-27 02:30:02 (UTC+8)
Abstract:	藉由不同的結構與氧化改善SGIO的敏感度 the improvement of sensitivity of SiGe nanowire biosensor could be realized by structural and oxidation effect. The transition current in thin and high transition mobility SiGe layer can be condensed by a-Si/SiGe stacked structure. The Ge fraction of the
Appears in Collections:	[Department of Microelectronics] Seminar Papers

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