研究不同的氧化氛圍與氧化時間與奈米線結構對生物感測器的靈敏度的最佳參數 Oxidation ambient, oxidation time and nanowire structure were investigated. Oxidation temperature was fixed at 950oC to prevent undesirable consequence if inappropriate lower or higher of temperature during Ge condensation. The oxidation time is 3min and