Oxidation study of Ge Condensation on SGOI Nanowire Biosensor Fabrication

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Title:	Oxidation study of Ge Condensation on SGOI Nanowire Biosensor Fabrication
Authors:	賴瓊惠 Lai, Chiung-Hui
Contributors:	電子工程學系 Electronics Engineering
Keywords:	生物感測器;靈敏度 SGOI;biosensor;sensitivity
Date:	2012
Issue Date:	2014-06-27 02:29:36 (UTC+8)
Abstract:	研究不同的氧化氛圍與氧化時間與奈米線結構對生物感測器的靈敏度的最佳參數 Oxidation ambient, oxidation time and nanowire structure were investigated. Oxidation temperature was fixed at 950oC to prevent undesirable consequence if inappropriate lower or higher of temperature during Ge condensation. The oxidation time is 3min and
Appears in Collections:	[Department of Microelectronics] Seminar Papers

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