Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact
Vibration Mode SPM System Design

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題名:	Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact Vibration Mode SPM System Design
作者:	林君明 Lin, Jium-Ming
貢獻者:	通訊工程學系 Communication Engineering
關鍵詞:	Microprobe;Non-Contact Vibration Mode;Scanning Probe Microscope Microprobe;Non-Contact Vibration Mode;Scanning Probe Microscope
日期:	2009
上傳時間:	2014-06-27 01:53:34 (UTC+8)
摘要:	This research integrated a MEMS electrostatic driven micro-probe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in This research integrated a MEMS electrostatic driven micro-probe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in
顯示於類別:	[通訊工程學系] 期刊論文

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