Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact
Vibration Mode SPM System Design

Chung-Hua University Repository > 工學院 > 通訊工程學系 > 期刊論文 > Item 987654321/32413

jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://chur.chu.edu.tw/handle/987654321/32413

题名:	Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact Vibration Mode SPM System Design
作者:	林君明 Lin, Jium-Ming
贡献者:	通訊工程學系 Communication Engineering
关键词:	Microprobe;Non-Contact Vibration Mode;Scanning Probe Microscope Microprobe;Non-Contact Vibration Mode;Scanning Probe Microscope
日期:	2009
上传时间:	2014-06-27 01:53:34 (UTC+8)
摘要:	This research integrated a MEMS electrostatic driven micro-probe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in This research integrated a MEMS electrostatic driven micro-probe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in
显示于类别:	[通訊工程學系] 期刊論文

文件中的档案:

档案	描述	大小	格式	浏览次数
p_s119_0015.pdf		27Kb	Adobe PDF	138	检视/开启

在CHUR中所有的数据项都受到原著作权保护.