This research integrated a MEMS electrostatic driven micro-probe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in This research integrated a MEMS electrostatic driven micro-probe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in
