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    Please use this identifier to cite or link to this item: http://chur.chu.edu.tw/handle/987654321/32075


    Title: Fabricating microstructures on CVD diamond film
    Authors: 馬廣仁
    Ma, Kung-Jen
    Contributors: 工程科學博士學位學程
    Ph.D. Program in Engineering Science
    Keywords: diamond film;thermal annealing;reactive ion etching;RIE;microstructure
    Date: 2012
    Issue Date: 2014-06-27 01:43:39 (UTC+8)
    Abstract: Diamond has many advanced properties which may provide
    potential solutions to various engineering problems. This study focuses on
    fabricating micro-structures on CVD diamond film. A thin layer of Au or Pt
    together with thermal annealing process is used to
    Appears in Collections:[Ph.D.Program in Engineering Science] Journal Articles

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