This research integrated a balance with stylus probe, force actuator, LVDT (Linear Variable Differential Transformer), load cell, personal computer, and XYZ-stages into a contact force-controlled Scanning Probe Microscope (SPM) system, such that the surfa This research integrated a balance with stylus probe, force actuator, LVDT (Linear Variable Differential Transformer), load cell, personal computer, and XYZ-stages into a contact force-controlled Scanning Probe Microscope (SPM) system, such that the surfa
