混合氮和氧的氧化過程改善矽鍺奈米線的靈敏度 The improvement of the sensitivity of SiGe nano-wire using the mixed N2/O2 oxidation process has been investigated. The N2 ratio of 13.33% at 950oC anneal temperature could achieve the best performance which is the sensitivity of Si0.86Ge0.14 nano-wire.
