本發明提供一種整合有底閘極薄膜電晶體放大器之微陣列生物探針元件，係運用微機電製程與半導體製程，將微型陣列生物探針及底閘極薄膜電晶體放大器，整合於可撓式基板上，藉以使微陣列生物探針所獲得的信號可以就近進行放大，以提高信號雜訊比及阻抗匹配性能。再者，本發明將微陣列生物探針做在可撓式基板上，係可依待測生物體的外型輪廓來安置，生物探針的接觸效果會較好。 The present invention provides a microarray bioprobe device integrated with an amplifier formed of bottom-gate thin film transistors. The present invention utilizes a micro-electro-mechanical process as well as a semiconductor process to integrate microar
