Chung-Hua University Repository:Item 987654321/38720
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    Please use this identifier to cite or link to this item: http://chur.chu.edu.tw/handle/987654321/38720


    Title: 感應耦合電漿蝕刻氮化鎵/氮化銦鎵材料之研究
    Authors: 馬廣仁
    Contributors: 中華大學機械工程學系
    Date: 2006
    Issue Date: 2014-07-02 19:44:14 (UTC+8)
    Abstract: 計畫名稱：感應耦合電漿蝕刻氮化鎵/氮化銦鎵材料之研究
    成果報告：下載成果報告
    執行起迄：2006/08/01~2007/07/31
    總核定金額：659,000元
    Appears in Collections:[Department of Mechanical Engineering] Research Project

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