The implementation of neural network for semiconductor PECVD process

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题名:	The implementation of neural network for semiconductor PECVD process
作者:	鄧維兆 Deng, Wei-Jaw
贡献者:	餐旅管理學系 Hospitality Management
关键词:	Quality predictor;Plasma-enhanced chemical vapor deposition;PECVD;Back-propagation neural network;Taguchi method;Silicon dioxide films
日期:	2007
上传时间:	2014-06-27 15:02:52 (UTC+8)
摘要:	In semiconductor manufacturing, the monitoring system has been developed very excellently and can be used for comprehensively collecting the historical data of process information and quality characteristics of equipment. However, due to the high turnover
显示于类别:	[餐旅管理學系] 期刊論文

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