Capacity planning with sequential time constraints under various control policies in the back-end of wafer fabrications

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Title:	Capacity planning with sequential time constraints under various control policies in the back-end of wafer fabrications
Authors:	杜瑩美 Tu, Ying Mei
Contributors:	工業管理學系 Industrial Management
Keywords:	capacity planning;sequential time constraints;queuing model;simulation;wafer fabrication
Date:	2010
Issue Date:	2014-06-27 10:48:24 (UTC+8)
Abstract:	To ensure final product yield, engineers have to set up queue time limits for particular sequential machines during wafer processing; we name these as ‘sequential time constraints’ (STCs). This issue can be observed at the back-end of the copper interconn
Appears in Collections:	[Industrial Management] Journal Articles

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