Sampling Run-to-Run Control of Mix-Product Semiconductor Processes

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Title:	Sampling Run-to-Run Control of Mix-Product Semiconductor Processes
Authors:	許隆結 Jye, Sheu Long
Contributors:	機械工程學系 Mechanical Engineering
Keywords:	批次控制;混貨;半導體製程;抽樣量測 run-to-run control;mix-product;semiconductor processes;sampling-measurement
Date:	2010
Issue Date:	2014-06-27 03:32:30 (UTC+8)
Abstract:	本文針對混貨的半導體製程，發展出一套抽樣量測批次控制技術，分別估計因為不同機台或產品所造成的製程干擾，使混貨製程的輸出值能更有效的控制在穩定的狀態中。由模擬結果可知，對於抽樣量測情況下具有漂移干擾的混貨製程本文提出的抽樣量測控制方法有較好的控制效能。 This paper developed a sampling run-to-run control technique for the mix-product semiconductor processes. The controller can individually estimate the disturbances caused by tools and products and keep the process outputs around the targets. Simulation re
Appears in Collections:	[Department of Mechanical Engineering] Seminar papers

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