Non-Contact Mode SPM System Design with MEMS Micro-Cantilever Probe

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Please use this identifier to cite or link to this item: http://chur.chu.edu.tw/handle/987654321/34468

Title:	Non-Contact Mode SPM System Design with MEMS Micro-Cantilever Probe
Authors:	林君明 Lin, Jium-Ming
Contributors:	機械工程學系 Mechanical Engineering
Keywords:	SPM;MEMS;Non-Contact;laser Doppler vibrometer SPM;MEMS;Non-Contact;laser Doppler vibrometer
Date:	2008
Issue Date:	2014-06-27 02:51:34 (UTC+8)
Abstract:	This research integrated a MEMS electrostatic driven microprobe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in c This research integrated a MEMS electrostatic driven microprobe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in c
Appears in Collections:	[Department of Mechanical Engineering] Seminar papers

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