Wafer Level Test Vertical Probe Design

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Title:	Wafer Level Test Vertical Probe Design
Authors:	林君明 Lin, Jium-Ming
Contributors:	機械工程學系 Mechanical Engineering
Keywords:	Wafer level test;Vertical probe;Low k elastomer Wafer level test;Vertical probe;Low k elastomer
Date:	2008
Issue Date:	2014-06-27 02:50:32 (UTC+8)
Abstract:	The vertical probe of this paper used Si-wafer as substrate. The key point was to use buffer layers of low k elastomer to release uneven forces due to either non-uniform height of probe tips by the fabrication process, or uneven strains and stresses durin The vertical probe of this paper used Si-wafer as substrate. The key point was to use buffer layers of low k elastomer to release uneven forces due to either non-uniform height of probe tips by the fabrication process, or uneven strains and stresses durin
Appears in Collections:	[Department of Mechanical Engineering] Seminar papers

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