This research applied both the traditional PI (Proportion and Integration) compensator and the neural-fuzzy control methods for a Scanning Probe Microscope (SPM) system design. In addition, the actuator hysteresis effect was taken into consideration. It This research applied both the traditional PI (Proportion and Integration) compensator and the neural-fuzzy control methods for a Scanning Probe Microscope (SPM) system design. In addition, the actuator hysteresis effect was taken into consideration. It
