Scanning Probe Microscope System Design with  Fuzzy Control

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Please use this identifier to cite or link to this item: http://chur.chu.edu.tw/handle/987654321/34399

Title:	Scanning Probe Microscope System Design with Fuzzy Control
Authors:	林君明 Lin, Jium-Ming
Contributors:	機械工程學系 Mechanical Engineering
Keywords:	Scanning Probe Microscope;force actuator;hysteresis effect;fuzzy controller Scanning Probe Microscope;force actuator;hysteresis effect;fuzzy controller
Date:	2008
Issue Date:	2014-06-27 02:49:17 (UTC+8)
Abstract:	This research applied both the traditional PI (Proportion and Integration) compensator and the fuzzy control methods for a Scanning Probe Microscope (SPM) system design. In addition, the actuator hysteresis effect was taken into consideration. It can be This research applied both the traditional PI (Proportion and Integration) compensator and the fuzzy control methods for a Scanning Probe Microscope (SPM) system design. In addition, the actuator hysteresis effect was taken into consideration. It can be
Appears in Collections:	[Department of Mechanical Engineering] Seminar papers

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