Glass Substrate-Based Laser Anneal Amorphous Silicon Solar Cell Design

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Title:	Glass Substrate-Based Laser Anneal Amorphous Silicon Solar Cell Design
Authors:	林君明 Lin, Jium-Ming
Contributors:	機械工程學系 Mechanical Engineering
Keywords:	Keywords;非晶矽薄膜太陽電池;離子植入;雷射退火;電漿輔助化學氣相沉積 Keywords;非晶矽薄膜太陽電池;離子植入;雷射退火;電漿輔助化學氣相沉積
Date:	2008
Issue Date:	2014-06-27 02:49:02 (UTC+8)
Abstract:	Abstract --- 本研究是於玻璃基板上進行非晶矽薄膜太陽能電池製程設計，利用離子植入機、電子鎗蒸鍍機、PECVD以及曝光機等，在低鈉玻璃上，製作ITO透明導電膜、鋁電極及P/N junction等。並以CW 532nm雷射對各薄膜進行退火再結晶製程，以提昇在玻璃基板上製作非晶矽太陽能電池的效率。 This research was to make amorphous silicon solar cell on glass substrate. In order to raise the performance a continuous wave Nd: YAG laser (CW 532nm) was applied to anneal the amorphous thin film of silicon. The ion-implanter was also applied to make p-
Appears in Collections:	[Department of Mechanical Engineering] Seminar papers

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