Scanning Probe Microscope System Design with Linear Velocity Transducer for Feedback Compensation

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Please use this identifier to cite or link to this item: http://chur.chu.edu.tw/handle/987654321/34391

Title:	Scanning Probe Microscope System Design with Linear Velocity Transducer for Feedback Compensation
Authors:	林君明 Lin, Jium-Ming
Contributors:	機械工程學系 Mechanical Engineering
Keywords:	LVT;LVDT;Load cell;Surface profiler LVT;LVDT;Load cell;Surface profiler
Date:	2008
Issue Date:	2014-06-27 02:48:49 (UTC+8)
Abstract:	This research is to use Linear Velocity Transducer (LVT) to detect the vertical velocity of the stylus probe for the inner-loop damping and transient control of a force actuator. This improvement has been verified by MATLAB simulation and practical implem This research is to use Linear Velocity Transducer (LVT) to detect the vertical velocity of the stylus probe for the inner-loop damping and transient control of a force actuator. This improvement has been verified by MATLAB simulation and practical implem
Appears in Collections:	[Department of Mechanical Engineering] Seminar papers

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