Scanning Probe Microscope System Design with Linear Velocity Transducer for Feedback Compensation

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題名:	Scanning Probe Microscope System Design with Linear Velocity Transducer for Feedback Compensation
作者:	林君明 Lin, Jium-Ming
貢獻者:	機械工程學系 Mechanical Engineering
關鍵詞:	LVT;LVDT;Load cell;Surface profiler LVT;LVDT;Load cell;Surface profiler
日期:	2009
上傳時間:	2014-06-27 02:32:04 (UTC+8)
摘要:	This research is to use Linear Velocity Transducer (LVT) to detect the vertical velocity of the stylus probe for the inner-loop damping and transient control of a force actuator. This improvement has been verified by MATLAB simulation and practical implem This research is to use Linear Velocity Transducer (LVT) to detect the vertical velocity of the stylus probe for the inner-loop damping and transient control of a force actuator. This improvement has been verified by MATLAB simulation and practical implem
顯示於類別:	[機械工程學系] 期刊論文

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