This research provides a micro array bio-probe device[1,2] integrated with an amplifier formed of bottom-gate thin film transistors, which utilizes a micro-electro-mechanical process as well as a semiconductor process to integrate micro array bio-probes a This research provides a micro array bio-probe device[1,2] integrated with an amplifier formed of bottom-gate thin film transistors, which utilizes a micro-electro-mechanical process as well as a semiconductor process to integrate micro array bio-probes a