Effect of Oxidation on SGOI Nanowire Biosensor Fabrication Using Ge Condensation

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Title:	Effect of Oxidation on SGOI Nanowire Biosensor Fabrication Using Ge Condensation
Authors:	賴瓊惠 Lai, Chiung-Hui
Contributors:	電子工程學系 Electronics Engineering
Keywords:	矽鍺在絕緣上;生物感測器;靈敏度 SiGe-on-lnsulator;bio-sensor;oxidation
Date:	2012
Issue Date:	2014-06-27 02:29:10 (UTC+8)
Abstract:	鍺的濃縮提供矽鍺在絕緣上的鍺的比例,有助於提高生物感測器的靈敏度,本文探討鍺的最佳濃度對靈敏度的提升. Ge condensation offers an attractive way to increase Ge the fraction of Ge in SGOI. From authors' previous investigations, increasing the fraction of Ge increases the sensitivity of the SiGe nanowire sensor. To understand how Ge condensation on an SGOI na
Appears in Collections:	[Department of Microelectronics] Seminar Papers

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