This research is to use a Proportion and Derivative (PD) type fuzzy controller to reduce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical implementation This research is to use a Proportion and Derivative (PD) type fuzzy controller to reduce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical implementation
