Abstract—This research is to use fuzzy controller in the outer-loop to reduce the hysteresis effect as well as parameter variations of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by practical implementation. Abstract—This research is to use fuzzy controller in the outer-loop to reduce the hysteresis effect as well as parameter variations of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by practical implementation.
