This research is to deposit silicon thin film as the intrinsic layer of solar cell by PECVD on glass substrate with transparent conductive layer for solar cell intrinsic layer design. The method is to deposit transparent conductive layer ZnO and silver el This research is to deposit silicon thin film as the intrinsic layer of solar cell by PECVD on glass substrate with transparent conductive layer for solar cell intrinsic layer design. The method is to deposit transparent conductive layer ZnO and silver el