Reducing Hysteresis Effect of Force Actuator in a Scanning Probe Microscope

Chung-Hua University Repository > 工學院 > 通訊工程學系 > 研討會論文 > Item 987654321/32800

請使用永久網址來引用或連結此文件: http://chur.chu.edu.tw/handle/987654321/32800

題名:	Reducing Hysteresis Effect of Force Actuator in a Scanning Probe Microscope
作者:	林君明 Lin, Jium-Ming
貢獻者:	通訊工程學系 Communication Engineering
關鍵詞:	SPM;LVT;LVDT;Load cell;PI compensator;Force actuator;Hysteresis effect SPM;LVT;LVDT;Load cell;PI compensator;Force actuator;Hysteresis effect
日期:	2009
上傳時間:	2014-06-27 02:05:22 (UTC+8)
摘要:	This research is to use only PI controllers to reduce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). Comparisons with the previous design with Linear Velocity Transducer (LVT) for inner-loop feedback compensation are also This research is to use only PI controllers to reduce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). Comparisons with the previous design with Linear Velocity Transducer (LVT) for inner-loop feedback compensation are also
顯示於類別:	[通訊工程學系] 研討會論文

文件中的檔案:

檔案	描述	大小	格式	瀏覽次數
s_s119_0022.pdf		26Kb	Adobe PDF	53	檢視/開啟

在CHUR中所有的資料項目都受到原著作權保護.