This research is to use only PI controllers to reduce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). Comparisons with the previous design with Linear Velocity Transducer (LVT) for inner-loop feedback compensation are also This research is to use only PI controllers to reduce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). Comparisons with the previous design with Linear Velocity Transducer (LVT) for inner-loop feedback compensation are also
