Abstract—This research is to use fuzzy controller to re-duce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical implemen-tation to reduce the hysteresis ef Abstract—This research is to use fuzzy controller to re-duce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical implemen-tation to reduce the hysteresis ef
