This research is to use Ziegler-Nichols PID controller as a basement for the fuzzy controller design in the outer-loop of a Scanning Probe Microscope (SPM) to reduce the hysteresis effect. This improvement has been verified by practical implementation. Co This research is to use Ziegler-Nichols PID controller as a basement for the fuzzy controller design in the outer-loop of a Scanning Probe Microscope (SPM) to reduce the hysteresis effect. This improvement has been verified by practical implementation. Co
